Evaporation systemSputtering system

bak autoload With cassette to cassette handling for wafer sizes up to 8 inch, BAK Autoload completely eliminates manual handling of wafers saving time, eliminating operator errors and reducing costs.

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BAK Autoload For superior wafer handling

With cassette to cassette handling for wafer sizes up to 8 inch, BAK Autoload completely eliminates manual handling of wafers saving time, eliminating operator errors and reducing costs. BAK Autoload takes care of all necessary steps including wafer alignment for flat or notch,preloading domes and complete dome exchange through a side port in the coater. Precise control of robot and handling environment avoids potential sources of damage or contamination. Full integration with Evatec’s Khan process controller ensures seamless hardware management.

Complete process control

Quartz and optical monitoring including broadband
RGA integration
Full data logging and process statistics, SECS GEM compatibility

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bak 501 Ideal for process development or production in small substrate sizes or volumes, the BAK 501 comes with all the capability of its bigger brothers in the BAK family, at a footprint and cost to meet the tightest requirements.

evatec

The small machine for big ideas BAK 501

Ideal for process development or production in small substrate sizes or volumes, the BAK 501 comes with all the capability of its bigger brothers in the BAK family, at a footprint and cost to meet the tightest requirements. Simple process transfer to larger members of the BAK family makes future scale up simple. The BAK 501 can then be easily reconfigured for your next big idea.

Complete range of process components

IThe BAK 501 is compatible with Evatec’s range of production proven process accessories including.

The EBS 500 electron beam gun
Thermal sources
Sputter sources
Back and front side heating
Glow discharge cleaning
Custom substrate holder and handling systems

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bak 641 Indium tin oxid (ITO) is used to make transparent conductive coatings. The thin film layer was deposited by electron-beam evaporation system in a reactive, high temperature process.

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Indium Tin Oxide the right configuration for every application

Indium tin oxid (ITO) is used to make transparent conductive coatings. The thin film layer was deposited by electron-beam evaporation system in a reactive, high temperature process. Typically applications of ITO thin films are in optoelectronics, solar cells and in the LCD industry.

ITO coatings can be made in the BAK 641 coating system The key features of the BAK 641 are

Compact system design with optimized throughput on small footprint
Excellent reliability and cost of ownership
Good uniformities
User friendly GUI (Graphic User Interface)

The BAK 641 is available with different evaporation sources

Resistance heated sources
Electron beam sources ESQ212 – digitally controlled with various types of crucibles
 (pot, multipocket, with liners) for all types of materials
Inductive heated sources for micro electronics
Chimney sources for sublimating materials
Special sources for large quantities of evaporated materials

The BAK 641has the state of the art control system KHAN. KHAN Process Control with user-friendly Graphic User Interface set fully automatic production process sequence based on Semi standards (SECS I / II, alarm management, real time trending, process statistics, RGA integration, data collection, maintenance statistics etc.)The specifications of the BAK 641 coating system used for a ITO evapor - ation are shown below.

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bak 761 With over 1200 BAKs in use around the world,the BAK761 mid size evaporator remains a firm favourite for both development and production

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The industry standard evaporator for optics and semiconductor

With over 1200 BAKs in use around the world, the BAK761 mid size vaporator remains a firm favourite for both development and production

Wide range of process components

Custom configure your system with Evatec’s process components

Up to three EBS500 electron beam guns
Thermal sources
Ion & Plasma sources for etch and deposition
Back and front side heating
Special sources and feed systems for thick layers
Full range of custom substrate holders and handling systems

Complete process control

From system pump down to vent, Evatec’s user friendly Khan platform running in Windows XP keeps you in control for best process repeatabilities and yield

Quartz and optical monitoring including broadband
RGA integration
Full data logging and process statistics, SECS GEM compatibility

Typical applications

SAW, LEDs, MEMS, Power Devices, Optics, Photovoltaics, Sensors

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bak samson SAMSON is a split chamber system where only the substrate chamber is vented during substrate load / unload.

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SAMSON Split chamber System

SAMSON is a split chamber system where only the substrate chamber is vented during substrate load / unload. The source chamber is kept continually under vacuum and the system is optimised for deposition of highly reactive materials or complex alloying processes where stoichiometry control is critical.

Venting of the substrate chamber enables short extremely short cycle times making the system an ideal choice for high throughput processes on 6 or 8 inch wafers.

Deposition sources available include Evatec’s EBS 500 and Evatec’s high temperature effusion sources with stable control at up to 2000C

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bak 901 The BAK901 mid size evaporator sits right in the centre of Evatec’s range of BAK box coaters between 0.5 and 1.4m.

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Evaporator for Optics and Semiconductor

The BAK901 mid size evaporator sits right in the centre of Evatec’s range of BAK box coaters between 0.5 and 1.4m. Available also a High Precision version, the BAK901HP has extended throw for special deposition and etch applications.

Wide range of process components

Custom configure your system with Evatec’s process components

Up to three EBS500 electron beam guns
Thermal sources
Ion & Plasma sources for etch and deposition
Back and front side heating
Special sources and feed systems for thick layers
Full range of custom substrate holders and handling systems

Complete process control

From system pump down to vent, Evatec’s user friendly Khan platform running in Windows XP keeps you in control for best process repeatabilities and yield

Quartz and optical monitoring including broadband
RGA integration
Full data logging and process statistics, SECS GEM compatibility

Typical applications

SAW, LEDs, MEMS, Power Devices, Optics, Photovoltaics, Sensors

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bak 1101 Whatever you process, now or in the future, the flexible system can be configured and reconfigured time after time.

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Cost effective volume production with BAK1101

The BAK901 mid size evaporator sits right in the centre of Evatec’s range of BAK box coaters between 0.5 and 1.4m. Available also a High Precision version, the BAK901HP has extended throw for special deposition and etch applications.

Complete range of process  components

Whatever you process, now or in the future, the flexible system can be configured and reconfigured time after time.

Up to three EBS500 electron beam guns
Thermal sources
Inductively coupled and chimney sources
Ion and plasma sources for etch or assisted deposition
Back and front side heating
Special sources and feed systems for thick layers
Full range of substrate holder and handling systems

Complete process control

From pump down to system vent, Evatec’s user friendly Khan platform ensures all process sequences conform within strict limits for best overall repeatabilities and yields.

Quartz and Optical Monitoring including broadband
RGA integration
Full SECS GEM compatibility

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bak 1401 Including the established BAV1250 and BAK1401 systems, Evatec offers custom engineering solutions for handling large substrates, complex substrate geometries or coating in extremely large batch sizes

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Large & Custom BAKs

Including the established BAV1250 and BAK1401 systems, Evatec offers custom engineering solutions for handling large substrates, complex substrate geometries or coating in extremely large batch sizes

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