Levitech Levitech In-line 타입 ALD 장비 Linear floating wafer track for deposition of ALD Al2O3 films for surface passivation

    In-line 타입 ALD 장비

    Company Profile

    Levitech is a global player in semiconductor production solutions for the IC and solar industry. The company maintains a strong technological base, state-of-the-art manufacturing facility, a competent and qualified workforce, and a highly trained, strategically located support network. A spin-off of ASM International, Levitech was established (in 2009) around its core product, the Levitor™ system, based on a revolutionary patented technology, and used in the semiconductor industry for Rapid Thermal Processing (RTP). Levitech’s leading-edge RTP equipment is qualified for 200mm and 300mm wafer processing for the semiconductor industry. Together with its state-of-the-art equipment and process development for the solar industry, Levitech’s technology portfolio is strongly positioning the Company for future growth

    Advantages Levitrack ALD system :

    • High throughput > 3600wafers/hr
    • No deposition of film on walls of system
    • Deposition only on one side of substrate
    • Narrow gaps guarantee fast heating of substrate upon entering track
    • Atmospheric processing: no vacuum pumps required
    • System can be manufactured from aluminium (at T < 350°C)
    • No moving parts
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